論文 - 遠田 義晴
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Characteristics of Silicon/Nitrogen-Incorporated Diamond-Like Carbon Films Prepared by Plasma-Enhanced Chemical Vapor Deposition（共著)
H. Nakazawa, S. Miura, R. Kamata, S. Okuno, Y. Enta, M. Suemitsu, T Abe
Japanese Journal of Applied Physics 51 015603 2012年01月
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Characteristics of Silicon/Nitrogen-Incorporated Diamond-Like Carbon Films Prepared by Plasma-Enhanced Chemical Vapor Deposition
Hideki Nakazawa, Soushi Miura, Ryosuke Kamata, Saori Okuno, Yoshiharu Enta, Maki Suemitsu, Toshimi Abe
JAPANESE JOURNAL OF APPLIED PHYSICS 51 ( 1 ) 2012年01月
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Initial thermal oxidation of Si(100) investigated by Si 2p core-level photoemission（共著）
Yoshiharu ENTA, Hideki NAKAZAWA, Hiroo KATO, Yasuo SAKISAKA
Photon Factory Activity Report 2010 28B 57 - 57 2011年11月
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Controls over Structural and Electronic Properties of Epitaxial Graphene on Silicon Using Surface Termination of 3C-SiC(111)/Si（共著）
Hirokazu Fukidome, Shunsuke Abe, Ryota Takahashi, Kei Imaizumi, Syuya Inomata, Hiroyuki Handa, Eiji Saito, Yoshiharu Enta, Akitaka Yoshigoe, Yuden Teraoka, Masato Kotsugi, Takuo Ohkouchi, Toyohiko Kinoshita, Shun Ito and Maki Suemitsu
Applied Physics Express 4 115104 2011年11月
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Control of Epitaxy of Graphene by Crystallographic Orientation of Si Substrate toward Device Applications（共著）
Hirokazu Fukidome, Ryota Takahashi, Shunsuke Abe, Kei Imaizumi, Hiroyuki Handa, Hyun-Chul Kang, Hiromi Karasawa, Tetsuya Suemitsu, Taiichi Otsuji, Yoshiharu Enta, Maki Suemitsu, Akitaka Yoshigoe, Yuden Teraoka, Masato Kotsugi, Takuo Ohkouchi, Toyohiko Kinoshita
Journal of Materials Chemistry 21 17242 - 17248 2011年10月
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シリコン酸化膜の不均一な熱分解（共著）
遠田義晴，小川可乃，永井孝幸
電子情報通信学会技術研究報告書 111 ( 176 ) 61 - 64 2011年08月
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Oxygen-Induced Reduction of the Graphitization Temperature of SiC Surface（共著）
Kei Imaizumi, Hiroyuki Hanada, Ryota Takahashi, Eiji Saito, Hirokazu Fukidome, Yoshiharu Enta, Yuden Teraoka, Akitaka Yoshigoe, Maki Suemitsu
Japanese Journal of Applied Physics 50 070105 2011年07月
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Effect of Interfacial Strain in Wet Oxidation Kinetics on Si(100)（共著）
Bongjin Simon Mun, Massimiliano Rossi, Yoshiharu Enta
Journal of Korean Physical Society 58 920 - 923 2011年04月
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Thermal desorption of silicon oxide layer on Si(100) investigated by Si 2p core-level photoemission（共著）
Yoshiharu ENTA, Hideki NAKAZAWA, Sumiya SATO, Hiroo KATO, Yasuo SAKISAKA
Photon Factory Activity Report 2009 27B 67 - 67 2010年11月
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Changes in chemical bonding of diamond-like carbon films by atomic-hydrogen exposure（共著）
H. Nakazawa, R. Osozawa, Y. Enta, M. Suemitsu
Diamond and Related Materials 19 1387 - 1392 2010年11月
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Changes of chemical bonding of diamond-like carbon films by atomic-hydrogen exposure（共著）
Hideki NAKAZAWA, Ryoichi OSAZAWA
Photon Factory Activity Report 2009 27B 66 - 66 2010年11月
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Changes in chemical bonding of diamond-like carbon films by atomic-hydrogen exposure
H. Nakazawa, R. Osozawa, Y. Enta, M. Suemitsu
DIAMOND AND RELATED MATERIALS 19 ( 11 ) 1387 - 1392 2010年11月
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Silicon thermal oxidation and its thermal desorption investigated by Si 2p core-level photoemission（共著）
Y. Enta, H. Nakazawa, S. Sato, H. Kato, Y. Sakisaka
Journal of Physics: Conference Series 235 012008 2010年06月
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Effects of Silicon Source Gas and Substrate Bias on the Film Properties of Si-Incorporated Diamond-Like Carbon by Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition (共著)
Hideki NAKAZAWA, Takeshi KINOSHITA, Yuhta KAIMORI, Yuhki ASAI, Maki SUEMITSU1, Toshimi ABE, Kanji YASUI, Tetsuo ENDOH, Takashi ITOH, Yuzuru NARITA, Yoshiharu ENTA, Masao MASHITA
Japanese Journal of Applied Physics 48 116002 2009年11月
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Angle-Resolved Photoemission from the Valence-Bands of Ce(111)（共著）
Osamu MORIMOTO, Hiroo KATO, Yoshiharu ENTA, Yasuo SAKISAKA
Photon Factory Activity Report 2008 26B 79 - 79 2009年11月
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Atomic hydrogen etching of silicon-incorporated diamond-like carbon films prepared by pulsed laser deposition
H. Nakazawa, H. Sugita, Y. Enta, M. Suemitsu, K. Yasui, T. Itoh, T. Endoh, Y. Narita, M. Mashita
DIAMOND AND RELATED MATERIALS 18 ( 5-8 ) 831 - 834 2009年05月
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Photoemission from the valence bands of Ce(111) on W(110) (共著)
O. Morimoto, H. Kato, Y. Enta, Y. Sakisaka
Surface Science 603 ( 13 ) 2145 - 2151 2009年04月
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Atomic Hydrogen Etching of Silicon-Incorporated Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition (共著)
H. Nakazawa, H. Sugita, Y. Enta, M. Suemitsu, K. Yasui, T. Ito, T. Endo, Y. Narita, M. Mashita
Diamond & Related Materials 18 831 - 834 2009年01月
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Initial oxidation of Si(110) as studied by real-time synchrotron-radiation x-ray photomission spectroscopy (共著)
M. Suemitsu, Y. Yamamoto, H. Togashi, Y. Enta, A. Yoshigoe, Y. Teraoka
Journal of Vacuum Science and Technology B27 547 - 550 2009年01月
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Thin-Film Deposition of Silicon-Incorporated Diamond-Like Carbon by Plasma-Enhanced Chemical Vapor Deposition Using Monomethylsilane as a Silicon Source (共著)
Hideki Nakazawa, Yuhki Asai, Takeshi Kinoshita, Maki Suemitsu, Toshimi Abe, Kanji Yasui, Takashi Itoh, Tetsuo Endoh, Yuzuru Narita, Atsushi Konno, Yoshiharu Enta, Masao Mashita
Japanese Journal of Applied Physics 47 ( 11 ) 8491 - 8497 2008年11月