Papers - ENTA YOSHIHARU
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In-Situ Observation of Wet Oxidation Kinetics on Si(100) via Ambient Pressure X-ray Photoemission Spectroscopy（共著）
M. Rossi他
Journal of Applied Physics 103 044104 2008.2
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Real-Time Observation of the Dry Oxidation of the Si(100) Surface with Ambient Pressure X-ray Photoelectron Spectroscopy（共著）
Y. Enta他
Applied Physics letters 92 012110 2008.1
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Real-Time Observation of Initial Thermal Oxidation on Si(110)-16×2 Surfaces by O1s Photoemission Spectroscopy Using Synchrotron Radiation（共著）
M. Suemitsu他
Japanese Journal of Applied Physics 46 1888 - 1890 2007.4
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Real-Time Observation of Initial Thermal Oxidation on Si(110)-16x2 Surface by Photoemission Spectroscopy（共著）
M. Suemitsu他
ECS Transactions 3 311 - 316 2006.11
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ALS in Berkeley 滞在雑記
遠田義晴
Photon Factory News 24 ( 2 ) 55 - 57 2006.8
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Integrated Description for Random-Adsorption and 2D-Island Growth Kinetics in Thin Film Growth: Autocatalytic-Reaction Model and Kinetic Monte-Carlo Simulation（共著）
Hideaki Togashi , Yoshiharu Enta, Maki Suemitsu
Applied Surface Science 252 5900 - 5906 2006.6
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Oxynitridation of Si(100) surface with thermally excited N2O gas（共著）
Y. Enta, K. Suto, S. Takeda, H. Kato, Y. Sakisaka
Thin Solid Films 500 129 - 132 2006.4
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Si 2p core-level spectra for oxynitride on Si(100) with plasma-excited N2O（共著）
Y. Enta, K. Suto, H. Kato, Y. Sakisaka
Photon Factory Activity Report 22 ( B ) 79 - 79 2005.11
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Soft X-ray fluorescence spectroscopy of FexCo1-xSi（共著）
N. Nakajima他
Photon Factory Activity Report 22 ( B ) 102 - 102 2005.11
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XPS study of the initial oxidation stage on HF-treated Si(100) surfaces（共著）
F. Hirose他
Photon Factory Activity Report 22 ( B ) 82 - 82 2005.11
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N2Oガス気相熱励起法によるシリコン酸窒化膜の形成（共著）
遠田義晴,武田創太郎
電子情報通信学会論文誌 J87-C 590 - 591 2004.7
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Si初期酸窒化のリアルタイム光電子分光
遠田義晴
ナノテクノロジーと高分解能電子分光PF研究会プロシーディング 2003.12
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Structure and Thermal Stability of the Chemical Bondings of Diamond-Like Carbon (DLC) Films Prepared by RF Magnetron Sputtering"jointly worked"
T. Mikami, H. Nakazawa, Y. Enta, M. Suemitsu, M. Mashita
Journal of The Surface Science Society of Japan 24 411 - 416 2003.7
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Structure, Chemical Bonding and These Thermal Stabilities of Diamond-Like Carbon (DLC) Films by RF Magnetron Sputtering（共著）
H. Nakazawa, T. Mikami, Y. Enta, M. Suemitsu, M. Mashita
Japanese Journal of Applied Physics 42 L676 - L679 2003.6